发明名称 NANSOSCALE PATTERNING AND FABRICATION METHODS
摘要 The invention disclosed relates to the formation of patterns on the surface of a substrate prepared by the deposition of clusters through a shadow-mask. In a preferred form the pattern is nanoscale and comprises an electrical connection between contacts on the substrate.
申请公布号 WO2006135261(A3) 申请公布日期 2007.02.22
申请号 WO2006NZ00154 申请日期 2006.06.15
申请人 NANO CLUSTER DEVICES LTD;PARTRIDGE, JAMES, GORDON;MACKENZIE, DAVID, MICHAEL, ANGUS;BROWN, SIMON, ANTHONY 发明人 PARTRIDGE, JAMES, GORDON;MACKENZIE, DAVID, MICHAEL, ANGUS;BROWN, SIMON, ANTHONY
分类号 C23C14/04;H01L21/266;H01L21/283;H01L21/426;H01L21/441;H05K3/10 主分类号 C23C14/04
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