| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit width adjusting apparatus in which a slit aperture part is accurately variable and high repeating accuracy is kept and to provide a microscope laser repair apparatus. SOLUTION: The slit width adjusting apparatus is provided with: a first width adjusting mechanism 31 which moves a pair of first slit members 34 in a direction orthogonally intersecting with a central axis line and in a mutually approaching or separating direction; and a second width adjusting mechanism which moves a pair of second slit members in a direction orthogonally intersecting with the central axis line, orthogonally intersecting with the moving direction of the first slit members 34, and at the same time in a mutually approaching or separating direction. The respective slit width adjusting mechanisms include: a pair of movable members 32 which are parallel to each other; a pair of linear guide means 33 which movably guide the pair of movable members 32 at their both ends; slit members 34 provided opposing to each other at the approximately intermediate position of the pair of movable members; and a driving means 35 which moves the pair of movable members in the direction in which the movable members approach to or separate from each other at the approximately intermediate position of the pair of movable members. COPYRIGHT: (C)2007,JPO&INPIT
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