| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced-pressure drying device excelling in safety even when a substrate is large, and capable of suppressing generation of vibration and of surely preventing transfer generated in an application liquid applied to the substrate. SOLUTION: This reduced-pressure drying device 23b is provided with: a chamber 6 having, in a side wall part, a carrying-in port 61 for carrying in an LCD substrate G and a carrying-out port 62 for carrying out the LCD substrate G therefrom and used for housing the LCD substrate G carried in from the carrying-in port 61 in a nearly horizontal form; gate members 63 and 64 for opening and closing the carrying-in port 61 and the carrying-out port 62; a decompression mechanism for reducing the pressure in the chamber 6 with the carrying-in port 61 and the carrying-out port 62 closed by the gate members 63 and 64; a transport mechanism 7 for generally horizontally transporting the LCD substrate G to carry it into the chamber 6 from the carrying-in port 61 and for generally horizontally transporting it to carry out it to the outside from the carrying-out port 62 after a reduced-pressure drying process by the decompression mechanism; and a belt 71 capable of evenly supporting the LCD substrate G in the chamber 6 without locally supporting it. COPYRIGHT: (C)2007,JPO&INPIT
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