发明名称 |
ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT METHOD, ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT DEVICE, AND ELECTRON BEAM RECORDING DEVICE |
摘要 |
<p>It is an object of the present invention to make it possible to stably and correctly measure a changing amount of a beam position when a beam displacement is measured prior to a recording operation performed by an electron beam recording apparatus. A measuring device 10 for measuring a displacement of an electron beam E P prior to a recording operation, comprises: a knife edge 11 disposed at an irradiating position of the beam spot E P ; detecting means (Farady cup 12 or the like) for detecting an electron beam E irradiating through the knife edge 11; filter means (high frequency cut filter 14 or the like) for removing a changing frequency component of measurement subj ect from an output of the detecting means; and control means 15 for controlling a reference position of the electron beam E in accordance with an output from the filter means, in a manner such that the center of the beam spot E P will be at the front end position of the knife edge 11. A displacement of the beam spot E P is measured in accordance with an output change of the detecting means when the center of the beam spot E P deviates from the front end of the knife edge 11.</p> |
申请公布号 |
EP1755001(A1) |
申请公布日期 |
2007.02.21 |
申请号 |
EP20050745969 |
申请日期 |
2005.06.02 |
申请人 |
PIONEER DESIGN CORPORATION |
发明人 |
KOJIMA, YOSHIAKI |
分类号 |
G03F7/20;G11B7/26;G11B9/10;H01J37/04;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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