Laite ja menetelmä kaukoplasma-avusteiseen atomikerroskasvatukseen käyttäen DC-biasta,申请号FI20070005125-传众专利搜索

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发明名称	Laite ja menetelmä kaukoplasma-avusteiseen atomikerroskasvatukseen käyttäen DC-biasta
摘要
申请公布号	FI20075125(A)	申请公布日期	2007.02.21
申请号	FI20070005125	申请日期	2007.02.21
申请人	INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY,	发明人	JEON,HYEONG-TAG;KIM,UN-JUNG;KIM,JU-YOUN;KIM,JIN-WOO
分类号		主分类号
代理机构		代理人
主权项
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