PRELIMINARY DISPENSING APPARATUS OF SLIT COATER

摘要

A preliminary ejecting device of a slit coater is provided to reduce consumption of cleaning solution by washing a half of a roller with the cleaning solution and cleaning the rest of the roller with the used cleaning solution. The preliminary ejecting device(100) of a slit coater is composed of a cleaning tank(112) having a roller(114) rotatably disposed to preliminarily discharge a coating solution(119) and a cleaning tank receiving cleaning solution and washing the roller. The cleaning tank is divided into first and second regions(170,180) by a barrier(116). First and second tanks(120,130) for storing the cleaning solution are installed in the first and second regions, respectively. The cleaning solution is supplied to the first and second regions in order with circulating through a gap between the first and second tanks, to wash the roller.