CLEANING A MASK SUBSTRATE,申请号EP20050738592-传众专利搜索

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发明名称	CLEANING A MASK SUBSTRATE
摘要
申请公布号	EP1754109(A2)	申请公布日期	2007.02.21
申请号	EP20050738592	申请日期	2005.05.18
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V.	发明人	RASTEGAR, ABBAS
分类号	G03F1/00;B08B3/02;B08B17/02;H01L21/00	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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