发明名称 Thin-film devices and method for fabricating the same on same substrate
摘要 To satisfy the different requirement of TFTs function as peripheral driving circuit and pixel switching device, the modified TFT structure with various thicknesses of gate insulating layers is disclosed. For the peripheral driving circuit, the thinner thickness of the gate-insulating layer is formed, the higher driving ability the TFT performs. However, for the pixel switching device, the thicker thickness of the gate insulating layer is formed, the better reliability the TFT has. The present invention provides a first TFT (peripheral driving circuit) comprising a first gate insulating layer and a second TFT (pixel switching device) comprising a first and second gate insulating layer. Thus, the gate insulating layer of the peripheral driving circuit has a thickness less then that of the pixel switching device.
申请公布号 US7180156(B2) 申请公布日期 2007.02.20
申请号 US20040954674 申请日期 2004.09.30
申请人 TPO DISPLAYS CORP. 发明人 CHANG SHIH-CHANG;TSAI YAW-MING
分类号 H01L29/00;H01L21/77;H01L21/84;H01L27/12;H01L31/036 主分类号 H01L29/00
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