| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid droplet ejection nozzle plate and a liquid droplet ejection head capable of improving yield and productivity without causing any cracking or chipping of a silicon substrate during processing nor leaving any foreign substances including a resin, an abrasive or the like within a nozzle hole. SOLUTION: On one face of the silicon substrate 100, both of a first recessed portion 107 serving as the ejection port part 11a of the nozzle hole 11 for ejecting liquid droplets therethrough and a second recessed portion 108 serving as an introduction port part 11b are formed in advance. An ink repellent layer 111 having a weak adhesive property to the resin is formed on one face of the silicon substrate and also in the first and second recessed portions. A support substrate 400 is stuck on the silicon substrate having the ink repellent layer 111 formed thereon using the resin, the silicon substrate is thinned from the side opposite to the sticking side of the support substrate to a required thickness, the support substrate 400 is stripped from the silicon substrate, and furthermore the resin and the ink repellent layer 111 are removed from the silicon substrate to manufacture a nozzle plate 1. COPYRIGHT: (C)2007,JPO&INPIT
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