发明名称 SILICON CARBIDE JUNCTION BARRIER SCHOTTKY DIODES WITH SUPPRESSED MINORITY CARRIER INJECTION
摘要 Integral structures that block the current conduction of the built-in PiN diode in a junction barrier Schottky (JBS) structure are provided. A Schottky diode may be incorporated in series with the PiN diode, where the Schottky diode is of opposite direction to that of the PiN diode. A series resistance or and insulating layer may be provided between the PiN diode and a Schottky contact. Silicon carbide Schottky diodes and methods of fabricating silicon carbide Schottky diodes that include a silicon carbide junction barrier region disposed within a drift region of the diode are also provided. The junction barrier region includes a first region of silicon carbide having a first doping concentration in the drift region of the diode and a second region of silicon carbide in the drift region and disposed between the first region of silicon carbide and a Schottky contact of the Schottky diode. The second region is in contact with the first region of silicon carbide and the Schottky contact. The second region of silicon carbide has a second doping concentration that is less than the first doping concentration.
申请公布号 WO2006122252(A3) 申请公布日期 2007.02.15
申请号 WO2006US18260 申请日期 2006.05.10
申请人 CREE, INC.;RYU, SEI-HYUNG;AGARWAL, ANANT, K. 发明人 RYU, SEI-HYUNG;AGARWAL, ANANT, K.
分类号 H01L29/872;H01L21/04 主分类号 H01L29/872
代理机构 代理人
主权项
地址