| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive film having a photosensitive layer which is laminated with good conformability to unevenness on the surface of an adherend even if the photosensitive layer is thinned, capable of realizing a high production yield, and capable of ensuring good resolution. <P>SOLUTION: The photosensitive film is obtained by stacking a cushion layer 12, the photosensitive layer 14 and a protective film 16 in this order on a support film 10, wherein the interlayer adhesive force between the cushion layer 12 and the photosensitive layer 14 is larger than that between the photosensitive layer 14 and the protective film 16, the interlayer adhesive force between the support film 10 and the cushion layer 12 is larger than that between the cushion layer 12 and the photosensitive layer 14, rates of shrinkage of the protective film 16 by heating at 120°C for 20 min are ≤5.0% in a lengthwise direction and ≤3.0% in a crosswise direction, and the photosensitive layer 14 is a layer formed by applying and drying a photosensitive resin composition on the protective film 16. <P>COPYRIGHT: (C)2007,JPO&INPIT |
