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发明名称
Semiconductor pressure sensor with polysilicon diaphragm and single-crystal gage elements and fabrication method therefor
摘要
申请公布号
EP0672898(B1)
申请公布日期
1999.05.26
申请号
EP19950103970
申请日期
1995.03.17
申请人
THE FOXBORO COMPANY
发明人
FUNG, CLIFFORD D.
分类号
G01L9/00;(IPC1-7):G01L9/06
主分类号
G01L9/00
代理机构
代理人
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