发明名称 Method for producing actuator device, actuator device, liquid-jet head and liquid-jet apparatus
摘要 A method for producing an actuator device, comprising the steps of: forming a vibration plate on a substrate; and forming a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate, wherein in the step of forming the piezoelectric element, the upper electrode is formed on the piezoelectric layer by sputtering, a temperature of 25 to 250 (° C.) and a pressure of 0.4 to 1.5 (Pa) are used during the sputtering, and upon the sputtering, the upper electrode having a thickness of 30 to 100 (nm), stress of 0.3 to 2.0 (GPa), and specific resistance of 2.0 (x10<SUP>-7 </SUP>Omega.m) or less is formed.
申请公布号 US2007033784(A1) 申请公布日期 2007.02.15
申请号 US20060501032 申请日期 2006.08.09
申请人 SEIKO EPSON CORPORATION 发明人 LI XIN-SHAN;NISHIWAKI TSUTOMU
分类号 H04R17/00 主分类号 H04R17/00
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