发明名称 Semiconductor device having a gate electrode material feature located adjacent a gate width side of its gate electrode and a method of manufacture therefor
摘要 The present invention provides a semiconductor device, a method of manufacture therefore and an integrated circuit including the same. The semiconductor device ( 300 ), without limitation, may include a gate electrode ( 320 ) having a gate length (l) and a gate width (w) located over a substrate ( 310 ) and a gate electrode material feature ( 330 ) located adjacent a gate width (w) side of the gate electrode ( 320 ). The semiconductor device ( 300 ) may further include a silicide region ( 350 ) located over the substrate ( 310 ) proximate a side of the gate electrode ( 320 ), the gate electrode material feature ( 330 ) breaking the silicided region ( 350 ) into multiple silicide portions ( 353, 355, 358 ).
申请公布号 US2007034969(A1) 申请公布日期 2007.02.15
申请号 US20050202835 申请日期 2005.08.12
申请人 TEXAS INSTRUMENTS INC. 发明人 WANG DENING
分类号 H01L21/4763;H01L29/76 主分类号 H01L21/4763
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