NOVEL NEODYMIUM(III) COMPLEXES AND PREPARATION METHOD THEREOF

摘要

A neodymium complex represented by specific formula as precursor of neodymium oxide thin film is provided to show thermal stability and increased volatile property advantageous to form the thin film of neodymium oxide with high quality by reacting neodymium compound with alkali metal salt compound then substitution reacting the reactive product with alcohol compound. The neodymium oxide precursor is represented by a formula of Nd[O-A-N(R^3)-B-NR(^1)R(^2)]3 wherein A is C2 to C5 alkylene; B is C1-C4 alkylene; A and B are substituted by at least one of linear or branched alkyl group; and R^1, R^2 and R^3 are independently H or C1 to C5 linear or branched alkyl group. More particularly, the neodymium oxide precursor is represented by a formula of Nd[OCR(^4)R(^5)(CH2)mN(R(^3))-(CH2)nNR(^1)R(^2)]3 wherein R^1,R^2,R^3,R^4 and R^5 are independently H or C1 to C5 linear or branched alkyl group, and m and n are integer of 1 to 4. The neodymium oxide precursor is grown into neodymium oxide by MOCVD or ALD.