| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw detecting method which enables the execution of accurate visual examination regardless of the size of an angle of inclination of the inspection surface of a sheet. SOLUTION: An imaging device 13 for imaging the inspection surface 12a of the sheet 12 and a lens 14 as well as a floodlight projector 15 for irradiating the inspection surface 12a with illumination light are arranged so as to be positioned so that a predetermined angleαis formed with respect to the normal line direction of the inspection surface 12a by a plane including the optical axis of the illumination light entering the inspection surface 12a from the floodlight projector 15 and the optical axis of the reflected light reflected by the inspection surface 12a to enter the lens 14 and the imaging device 13. COPYRIGHT: (C)2007,JPO&INPIT
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