摘要 |
PROBLEM TO BE SOLVED: To provide a TiN-based hard coating film superior in slidability, and to provide a surface-hardened material provided with the same. SOLUTION: The coating film consists of TiN crystals containing at least one element selected from the group consisting of B, Si and V. The TiN crystals have (111) faces in five times or more than the amount of (200) faces by proportion, with reference to an axis perpendicular to the surface of the coating film. COPYRIGHT: (C)2007,JPO&INPIT
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