发明名称 TiN-BASED HARD COATING FILM, AND SURFACE-HARDENED MATERIAL PROVIDED WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a TiN-based hard coating film superior in slidability, and to provide a surface-hardened material provided with the same. SOLUTION: The coating film consists of TiN crystals containing at least one element selected from the group consisting of B, Si and V. The TiN crystals have (111) faces in five times or more than the amount of (200) faces by proportion, with reference to an axis perpendicular to the surface of the coating film. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007031782(A) 申请公布日期 2007.02.08
申请号 JP20050217051 申请日期 2005.07.27
申请人 YOKOHAMA NATIONAL UNIV 发明人 SHODOSHIMA AKIRA
分类号 C23C30/00;C23C14/06 主分类号 C23C30/00
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