Remote plasma cleaning system of CVD device having waveguide formed several cleaning source output ports,申请号KR20050071182-传众专利搜索

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发明名称	Remote plasma cleaning system of CVD device having waveguide formed several cleaning source output ports
摘要
申请公布号	KR20070016480(A)	申请公布日期	2007.02.08
申请号	KR20050071182	申请日期	2005.08.04
申请人		发明人
分类号	H01L21/205;H01L21/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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