| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS switch which is mounted together with a CMOS circuit, and has a contact with high mechanical and electric reliability. SOLUTION: A movable part 1 constituting an MEMS switch and an insulating film 3 having high affinity with a CMOS process formed on a contact face of a fixed part 2 facing the movable part are formed. When using the switch, the movable part is moved by impressing a voltage on a driving part 4 and the movable part 1, and after making the movable part 1 contact with the fixed part 2, a voltage exceeding breakdown electric field strength of the insulation film 3 is impressed on the insulation film 3 to generate a dielectric breakdown. Thus, by reforming the insulation film 3 once, a part of a switch contact where mechanical fatigue is concentrated is protected, and a contact, transmitting electric signal through a current flow passage formed by the dielectric breakdown, is provided. COPYRIGHT: (C)2007,JPO&INPIT
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