APPARATUS FOR MULTIPLE BEAM DEFLECTION AND INTENSITY STABILIZATION
摘要
A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristics of the first control signal to account for errors in the scanning system.
申请公布号
WO2005031801(A3)
申请公布日期
2007.02.08
申请号
WO2004US30653
申请日期
2004.09.20
申请人
APPLIED MATERIALS, INC.;ALLEN, PAUL, C.;WICKSTROM, ALAN, J.;BOLT, BRYAN, C.
发明人
ALLEN, PAUL, C.;WICKSTROM, ALAN, J.;BOLT, BRYAN, C.