| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of precisely measuring a position by correcting a nonlinear error. <P>SOLUTION: The position measuring device comprises: a movable XY stage 105; a laser interferometer 300 for measuring a moving position of the XY stage 105 using a laser; an LPF 122 for attenuating the component of a predetermined frequency region from a measured value of the laser interferometer 300; an HPF 124 connected to the LPF 122 in parallel, an LPF 126 connected to the HPF 124 in series; an HPF 134 connected to the HPF 124 in series and the LPF 126 in parallel; an LPF 136 connected to the HPF 134 in series; and an adder 128 for adding measured value having passed the LPF 122, measured value having passed the HPF 124 and LPF 126, and measured value having passed the HPF 124, HPF 134 and LPF 136, and for outputting them. <P>COPYRIGHT: (C)2007,JPO&INPIT |
