Method for Manufacturing Metal line for Semi Conductor Using Tunneling,申请号KR20040000291-传众专利搜索

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发明名称	Method for Manufacturing Metal line for Semi Conductor Using Tunneling
摘要
申请公布号	KR100680421(B1)	申请公布日期	2007.02.08
申请号	KR20040000291	申请日期	2004.01.05
申请人		发明人
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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