发明名称 Separately strained N-channel and P-channel transistors
摘要 An integrated circuit with a first plurality of transistors formed on a first wafer and second plurality of transistors formed on a second wafer. At least a substantial majority of the transistor of the first transistor are of a first conductivity type and at least a substantial majority of the transistors of the second plurality are of a second conductivity type. After wafers are bonded together, a portion of the second wafer is removed wherein the strain of the channels of the second plurality of transistors is more compressive than the strain of the channels of the first plurality of transistors.
申请公布号 US7041576(B2) 申请公布日期 2006.05.09
申请号 US20040856581 申请日期 2004.05.28
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 POZDER SCOTT K.;CELIK SALIH M.;MIN BYOUNG W.;ADAMS VANCE H.
分类号 H01L21/30;H01L21/44;H01L21/4763;H01L21/58;H01L21/822;H01L27/01;H01L27/06;H01L27/12;H01L29/40 主分类号 H01L21/30
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