SUBSTRATE STORAGE CASSETTE, TRANSFER CONVEYOR, AND TRANSFER SYSTEM EMPLOYING THEM

摘要

PROBLEM TO BE SOLVED: To provide a cassette that has multiple racks for storing substrates and can retrieve the substrate in a rack by using a conveyor. SOLUTION: Each cassette rack 30 is used to move a substrate into or out of a cassette 10 by means of multiple rollers. Two rows of interlocking gears are used to rotate the rollers at the same rate and in the same direction. The rollers are also used as supporters of a mechanism that supports the substrate in each rack 30. A transfer platform 80 comprises multiple rollers and two rows of interlocking gears, and is used as a conveyor. After the gears on each cassette rack 30 and the gears on the transfer platform 80 are engaged with the gears on a cassette stage, the transfer platform 80 delivers or retrieves a substrate. COPYRIGHT: (C)2007,JPO&INPIT