| 摘要 |
A pressure control system of a single crystal growth apparatus and a pressure control method of a single crystal growth process using the same are provided to keep stably a high pressure state in a chamber and to improve the productivity of silicon crystal by controlling directly the suction of a pump without an additional pressure control unit using a controller. A pressure control system of a single crystal growth apparatus comprises a main pump for transferring a vacuum force into a chamber, an auxiliary pump for reinforcing the vacuum force of the main pump, a pressure gauge for measuring an inner pressure of the chamber, a controller for controlling the inner pressure of the chamber, and a wire for connecting the chamber, the pressure gauge, the main pump and the auxiliary pump with each other.
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