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发明名称
METHOD FOR CONTROLLING PLASMA PROCESSOR
摘要
申请公布号
EP1009199(B1)
申请公布日期
2007.02.07
申请号
EP19980936736
申请日期
1998.08.11
申请人
TOKYO ELECTRON LIMITED
发明人
NAGASEKI, KAZUYA;YAMAZAKI, HIROKI
分类号
H05H1/46;H01J37/32;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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