发明名称 SEMICONDUCTOR DEVICE COMPRISING AN INTEGRATED CIRCUIT PROVIDED WITH A CERAMIC SECURITY COATING AND METHOD OF MANUFACTURING SUCH A DEVICE
摘要 <p>A semiconductor device comprising a silicon substrate is provided with semiconductor elements on a first side, a metallization with connection pads for external contact, and a passivation layer which leaves the connection pads of the metallization exposed. The integrated circuit thus formed is also provided with a ceramic security coating having a matrix of monoaluminium phosphate which also leaves the connection pads of the metallization exposed. The protective layer can be deposited so as to have a thickness in the range from 2 to 10 mum, and hence is suitable for protecting integrated circuits used in smart cards. As a result, the information stored therein is not accessible.</p>
申请公布号 EP1029347(B1) 申请公布日期 2007.02.07
申请号 EP19990921073 申请日期 1999.06.03
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 VERHAEGH, NIJNKE, A., M.;VAN LIEROP, JOSEPH, G.;VAN BOMMEL, MARCUS, J.
分类号 H01L21/56;H01L21/316;H01L23/29;H01L23/31;H01L23/58 主分类号 H01L21/56
代理机构 代理人
主权项
地址