发明名称 Pattern forming method and wiring pattern forming method, and electro-optic device and electronic equipment
摘要 To provide a pattern forming method enabling a thin film to be patterned with high precision by easy and low cost techniques. A thin film 2 is provided on a base material 1 containing a sublimable dyestuff, light is irradiated to the base material 1 , and heat generated by the light irradiation sublimates the sublimable dyestuff in a desired region, thereby removing the thin film 2 corresponding to an irradiation region where the light is irradiated to thereby pattern this thin film 2.
申请公布号 US7172912(B2) 申请公布日期 2007.02.06
申请号 US20040898344 申请日期 2004.07.26
申请人 SEIKO EPSON CORPORATION 发明人 TOYODA NAOYUKI
分类号 G03F7/004;H01L21/00;B05D3/06;B05D3/12;B41M5/24;B41M5/46;G02B5/20;G02F1/1335;G02F1/1343;G03C8/00;G03F7/00;G03F7/36;H01L21/20;H01L21/302;H01L21/461;H01L51/00;H01L51/50;H05B33/10;H05B33/14;H05B33/26;H05K3/06;H05K3/14 主分类号 G03F7/004
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