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发明名称	SYSTEM FOR TRANSFERRING THE SUBSTRATE
摘要
申请公布号	KR20070015751(A)	申请公布日期	2007.02.06
申请号	KR20050070304	申请日期	2005.08.01
申请人		发明人
分类号	H01L21/68;B65G37/00	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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