Abatement of fluorine gas from effluent

摘要

An effluent abatement system 200 that may be used to abate F₂ gas content of effluent exhausted from a process chamber 35 , such as effluent from a CVD chamber cleaning process, includes a catalytic reactor 250 to reduce the content of F₂ in the effluent 100 . The system may further include a prescrubber 230 to add reactive gases to the effluent 100 and/or to treat the effluent 100 prior to treatment in the catalytic reactor 250 . Alternatively reactive gases can be added to the effluent 100 by a gas source 220.