发明名称 ELECTROMAGNETIC FIELD GENERATING ELEMENT AND ITS ASSEMBLING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an electromagnetic field generating element and a plurality of multipole elements including the electromagnetic field generating element. SOLUTION: The electromagnetic field generating element 1 comprises a magnetic pole piece 10, a yoke 12 on which the magnetic pole piece 10 is mounted, at least one coil 20, a vacuum sealed container 21 storing at least one coil 20, and holders 40, 23 holding the vacuum sealed container 21 so that the vacuum sealed container 21 is separated from the magnetic pole piece 10 and the yoke 12. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007027136(A) 申请公布日期 2007.02.01
申请号 JP20060216231 申请日期 2006.07.11
申请人 ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH 发明人 SALVESEN CARLO;DEGENHARDT RALF
分类号 H01J37/153;H01J37/05;H01J37/12;H01J37/141 主分类号 H01J37/153
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