| 摘要 |
PROBLEM TO BE SOLVED: To prevent a liquid from having a temperature distribution in its up and down direction by uniformly cooling the whole of the side surface of a liquid container. SOLUTION: The cooling device for cooling the liquid container (30) from the outside is equipped with the side surface cooling plate 42 arranged in close vicinity to the side surface of the liquid container, a Peltier element 44 for cooling the side surface cooling plate 42, the waste heat processing part (46) arranged under the liquid container and a high heat conductive member (48) for transmitting the heat generated in the Peltier element 44 to the waste heat processing part (46). COPYRIGHT: (C)2007,JPO&INPIT |
