| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate dividing method which divides a scribe-processed substrate surely with a high quality, and a substrate dividing apparatus used therefor. SOLUTION: The substrate dividing apparatus 1 having a base 30, an elastic sheet 20, and a ring 10 is used. In the substrate dividing method, (a) a substrate 70 is stuck to a sheet 20; (b) next, a ring 10 is depressed to stretch the sheet 20 to apply tension force to the substrate 70; (c) then, air is forced into an airtight container 80 comprising the base 30 and the sheet 20 to incurvate the sheet 20 to a convex form so that a bending moment is applied to the substrate 70 to divide it at scribe-processed places; and (d) finally, the curvature of the sheet 20 is relaxed. COPYRIGHT: (C)2007,JPO&INPIT |
