METHOD OF CLEANING DISC-SHAPED GLASS SUBSTRATE, AND MAGNETIC DISC

摘要

PROBLEM TO BE SOLVED: To improve cleanliness of the outer peripheral end face of a disc-shaped glass substrate. SOLUTION: There is provided a method of cleaning a disc-shaped glass substrate 1 by making a cleaning liquid W irradiated with ultrasonic wave to flow down on the outer peripheral end face 1a of the substrate 1 rotated while keeping its main surface vertically. There is also provided a method of cleaning a plurality of disc-shaped glass substrates 1 using the above cleaning method, where the plurality of glass substrates 1 expose their lower parts and are housed in a substrate case 20 spacing each other while being held vertically. The outer peripheral end face 1a of the exposed lower part of the substrate 1 is placed and supported on two rotatable shafts 2A and 2B so as to come into contact with them, and the substrate 1 is rotated by rotating the shafts 2A and 2B. COPYRIGHT: (C)2007,JPO&INPIT