发明名称 LIQUID DROPLET DISCHARGE HEAD, ITS MANUFACTURING METHOD, AND LIQUID DROPLET DISCHARGE APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head which highly densifies nozzles, pressure chambers and the like, increases the number of arrays of them, copes with change in ambient pressure, and is excellent in discharge stability. SOLUTION: The liquid droplet discharge head is provided with: a cavity substrate 3 wherein its bottom wall forms a vibration plate 8, a pressure chamber 7 to reserve liquid droplets and the bottom wall form a diaphragm 40, and an air pressure chamber 41 communicating with the outside air are formed; a vibration chamber 13 facing the vibration plate 8 and provided with a discrete electrode 17 to drive the vibration plate 8; an electrode substrate 4 in which a pressure compensation chamber 42 facing the diaphragm 40 and communicating with the vibration chamber 13 is formed; and a reservoir substrate 2 having a reservoir 10 supplying the pressure chamber 7 with liquid droplets, supplying holes 9 for transferring liquid droplets from the reservoir 10 to the pressure chamber 7, and nozzle communicating holes 6 for transferring the liquid droplets from the pressure chamber 7 to nozzle holes 5. The pressure compensation chamber 42 and the reservoir 10 are arranged in the position where they are overlapped to each other. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007021988(A) 申请公布日期 2007.02.01
申请号 JP20050209982 申请日期 2005.07.20
申请人 SEIKO EPSON CORP 发明人 MATSUNO YASUSHI;FUJII MASAHIRO
分类号 B41J2/045;B05C5/00;B41J2/055;B41J2/16 主分类号 B41J2/045
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