发明名称 Method of manufacturing thin-film electronic device
摘要 A method of manufacturing a thin-film electronic device comprising providing a dielectric layer on a base, providing a first electrically conductive layer having a first opening and covering at least part of the dielectric layer; and forming a first through-hole extending through the base and communicating with the first opening. A second electrically conductive layer may be provided on the base, and a dielectric layer may be provided so as to cover at least part of this second conductive layer.
申请公布号 US2007026581(A1) 申请公布日期 2007.02.01
申请号 US20060490164 申请日期 2006.07.21
申请人 TDK CORPORATION 发明人 KOMURO EIJU;SHINOURA OSAMU;OZAKI YUMIKO;SHIBUE AKIRA
分类号 H01L21/84 主分类号 H01L21/84
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