| 摘要 |
An apparatus for preliminarily drying an alignment layer is provided to control the evaporation of a solvent in an aligning solution spread on a substrate, thereby preventing the drying blotch, by controlling the wind speed of air current generated from air current supplying units. A plurality of air current supplying units(200) are positioned on a process chamber(100). Each of the air current supplying units includes an air current generator and a filter disposed below the air current generator. A stage(500), on which a substrate is loaded, is positioned below the process chamber. A wind speed controlling unit(300) is connected to each air current generator, and controls the wind speed of air current generated from the air current generator. |
