ENERGY COUPLED SUPERLATTICE STRUCTURES FOR SILICON BASED LASERS AND MODULATORS
摘要
<p>A waveguide structure includes a SOI substrate. A core structure is formed on the SOI substrate comprising a plurality of multilayers having alternating or aperiodically distributed thin layers of either Si-rich oxide (SRO), Si-rich nitride (SRN) or Si-rich oxynitride (SRON). The multilayers are doped with a rare earth material so as to extend the emission range of the waveguide structure to the near infrared region. A low index cladding includes conductive oxides to act as electrodes.</p>
申请公布号
WO2007014052(A1)
申请公布日期
2007.02.01
申请号
WO2006US28413
申请日期
2006.07.21
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;DAL NEGRO, LUCA;YI, JAE, HYUNG;KIMERLING, LIONEL, C.
发明人
DAL NEGRO, LUCA;YI, JAE, HYUNG;KIMERLING, LIONEL, C.