| 发明名称 |
CLEANING APPARATUS AND CLEANING METHOD |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable to reduce the usage quantity of a jetting gas and make the diameter of each of droplets to be jetted onto an object to be cleaned uniform. <P>SOLUTION: A cleaning apparatus employing a two-fluid nozzle 1 for generating droplets by blending a gas and a liquid has a configuration in which ultrasonic vibration is applied to the liquid. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
| 申请公布号 |
JP2007027270(A) |
申请公布日期 |
2007.02.01 |
| 申请号 |
JP20050204652 |
申请日期 |
2005.07.13 |
| 申请人 |
SONY CORP |
发明人 |
AISAKA TSUTOMU;SATO AKIRA |
| 分类号 |
H01L21/304;B08B3/02;B08B3/12;G03F1/82;H01L21/306 |
主分类号 |
H01L21/304 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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