| 摘要 |
PROBLEM TO BE SOLVED: To obtain a means for enhancing a cleaning spot by reducing liquid stagnation in the case of washing and drying by filling a metal mask for forming crystal electrode film with a crystal plate. SOLUTION: In a metal mask for forming crystal electrode film to be used while fixing, due to a frame jig, a lower electrode mask, a middle plate including a plurality of openings to be filled with a crystal plate and an upper electrode mask, at an edge of the opening parts of the middle plate, a plurality of slit-like grooves are provided, up to the vicinity of a central part of the middle plate, in the direction of thickness of the middle plate, thereby reducing liquid stagnation. COPYRIGHT: (C)2007,JPO&INPIT
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