| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring instrument capable of easily measuring the inside of a hole in a short time, by equipping it with a noncontact-type probe. SOLUTION: A light emitting diode (LED) 32 functioning as a light source, a pinhole (first pinhole 33a) functioning as a transmission section and a PSD 34 functioning as a light receiving element are contained in a substrate 31 of the probe 15. The probe 15 is inserted into the inside of the hole 21, and a hypothetical circle is obtained from a light receiving position on the PSD 34 which receives scattered light, so that the internal diameter of the hole 21 is calculated. COPYRIGHT: (C)2007,JPO&INPIT
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