| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film gas sensor constituted so as not only to suppress the moisture absorption due to a gas sensing layer to keep high sensitivity while suppressing an increase in power consumption to the utmost but also to receive no effect due to environment. SOLUTION: The thin film gas sensor is constituted so as to suppress the moisture absorption of the gas sensing layer 5 by alternately performing gas detecting driving (High state) for driving a heater layer over a predetermined period so that the gas sensing layer becomes a gas detecting temperature and moisture absorption suppressing driving for performing ON/OFF driving (alternately repeating a pulse ON state and a pulse OFF state) for performing the ON/OFF driving of the heater layer over a predetermined period. COPYRIGHT: (C)2007,JPO&INPIT
|
