| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control valve having a damping function, which can cope with a circulation of fluid requesting a corrosion-resistant property and high cleanliness in a control valve having a plurality of diaphragms. SOLUTION: The flow control valve has a first diaphragm 50 arranged at an inflow section 12 side, and a second diaphragm 60 arranged at an outflow section 15 side. The respective diaphragms are mounted in a chamber 20 by fixing their peripheries on a main body, and the chamber is divided into a first outer chamber 21 at the outside of the first diaphragm, a valve chamber 25 which is surrounded by the first and second diaphragms and has an inflow section, a valve seat 16, and an outflow section, and a second outer chamber 30 at the outside of the second diaphragm. The control valve also provides a pressure means M at least on either of the first and second outer chambers. In the control valve, a sliding hole 80 drilled in a direction equal to a moving direction of a valve mechanism is formed on the main body 11 on the first or second outer chamber, and a damping member 90 made of resin elastic body which is brought into press contact and is slid via an inner surface 81 and gap section 85 of the sliding hole is also provided on the valve mechanism. COPYRIGHT: (C)2007,JPO&INPIT
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