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发明名称
Verfahren zur Herstellung von optischen Elementen für die Mikrolithographie, damit erhältliche Linsensysteme und deren Verwendung
摘要
申请公布号
DE102005010655(A8)
申请公布日期
2007.02.01
申请号
DE200510010655
申请日期
2005.03.08
申请人
SCHOTT AG
发明人
WEHRHAN, GUNTHER;MARTIN, REGINA;PARTHIER, LUTZ;STAEBLEIN, JOERG;PETERMANN, KLAUS
分类号
G02B1/02;C30B29/12;C30B29/26;C30B29/28;G03F7/20
主分类号
G02B1/02
代理机构
代理人
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地址
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