Process and composition for removing residues fromthe microstructure of an object

摘要

A supercritical carbon dioxide composition that is effective in removing residues from the microstructure of an object is disclosed herein. In one aspect, there is provided a composition comprising carbon dioxide, an additive for removing the residues, an inhibitor for suppressing the residues, and a co-solvent for dissolving the additive and the inhibitor in the carbon dioxide at a pressurized fluid condition.