| 摘要 |
A vertical type furnace is provided to minimize the damage of a wafer due to the heat, to reduce a processing time and to improve endurance of a heater by circulating cooling air through an inner space of a process tube using a double tube structure as the process tube. A vertical type furnace includes a case, a heater and a process tube. The case(110) includes a supply port(111) and an exhaust port(112). The supply port and the exhaust port are capable of circulating cooling air. The heater(120) is installed at an inner portion of the case. The process tube(130) is installed in the case in order to load/unload a boat with a plurality of wafers. The process tube is formed like a double tube structure. The process tube includes an air inlet port(135) and an air exhaust port(136) The inlet and exhaust ports are capable of flowing the cooling air along an inner space of the double tube structure.
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