摘要 |
<P>PROBLEM TO BE SOLVED: To provide a component pressurizing apparatus coping with a highly packaged load by using a compact, light voice coil type motor. <P>SOLUTION: In a component pressurizing head 12 that holds a component by a component holding tool 13 provided at one end of an axis member 27, and rotates the component around an axis 27b and pressurizes the component in the direction of the axis 27b, first and second voice coil type motors 30A, 30B sandwich the axis member 27 and are arranged on both sides between upper and lower plates 21, 25, and a load is transmitted to the axis member 27 from the lower plate 25 connected to a movable yoke member in the two voice coil type motors, thus achieving the highly packaged load by using the compact, light voice coil type motor. <P>COPYRIGHT: (C)2007,JPO&INPIT |