发明名称 COMPONENT PRESSURIZING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a component pressurizing apparatus coping with a highly packaged load by using a compact, light voice coil type motor. <P>SOLUTION: In a component pressurizing head 12 that holds a component by a component holding tool 13 provided at one end of an axis member 27, and rotates the component around an axis 27b and pressurizes the component in the direction of the axis 27b, first and second voice coil type motors 30A, 30B sandwich the axis member 27 and are arranged on both sides between upper and lower plates 21, 25, and a load is transmitted to the axis member 27 from the lower plate 25 connected to a movable yoke member in the two voice coil type motors, thus achieving the highly packaged load by using the compact, light voice coil type motor. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007019138(A) 申请公布日期 2007.01.25
申请号 JP20050197190 申请日期 2005.07.06
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NARISEI YASUHIRO;MUKOJIMA HITOSHI
分类号 H01L21/52;H02K33/16 主分类号 H01L21/52
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