FILM DEPOSITING METHOD, FILM FORMING METHOD, METHOD OF FORMING FILM DEPOSITING DEVICE, FILM FORMING DEVICE, ELECTRO-OPTICAL DEVICE MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPRATUS

摘要

PROBLEM TO BE SOLVED: To provide a film forming method which is capable of forming a film excellent in cracking resistant properties. SOLUTION: The film forming method comprises processes of inserting a substrate into a furnace kept at a prescribed temperature, heating the inside of the furnace, depositing a film on the substrate inside the furnace, and cooling off the inside of the furnace at a cooling rate slower than a heating rate in a heating process. COPYRIGHT: (C)2007,JPO&INPIT