,申请号JP20060530160-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP2007501329(A)	申请公布日期	2007.01.25
申请号	JP20060530160	申请日期	2004.03.18
申请人		发明人
分类号	C23C16/458;H01L21/205	主分类号	C23C16/458
代理机构		代理人
主权项
地址

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