发明名称 Method for cleaning disk-shape glass substrate and magnetic disk
摘要 A method for cleaning a disk-shape glass substrate, which comprises rotating the disk-shape glass substrate on its center with its main surface vertical, and making a cleaning fluid irradiated with ultrasonic waves run down on the outer peripheral edge surface of the rotating glass substrate.
申请公布号 US2007017547(A1) 申请公布日期 2007.01.25
申请号 US20060486010 申请日期 2006.07.14
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 MIYAHARA OSAMU;MANNAMI KAZUO;SOMEYA KUNIYUKI;MARUYAMA TSUTOMU
分类号 B08B3/12;B08B7/00;C23G1/00 主分类号 B08B3/12
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